ddc4cb5d8c4786dc3a5bbf7bbfcff189ec84c89746ac6cedfcbb6b92db8a71a9 vault_1.16.12+ent.hsm_linux_amd64.zip 059b882a5858fc4df9278dc454800e92bfb5dbc8834aeb4c03de247120ebc375 vault_1.16.12+ent.hsm_linux_arm64.zip